| 摘要 |
<p>An electro-optic wave guide modulatorfor both intensity modulating and continuously deflecting an incident laser beam (16). A first set of electrodes (40) for intensity modulating the beam include substantially parallel, periodically interdigital conductors (40a, 40b) affixed to a substrate surface (22) and coupled (44) to a controlled voltage source. A second set of electrodes (42) for beam deflecting have non-parallel conductors (42a, 42b) affixed to the same substrate (22) and are also coupled (46) to a controlled voltage. By controlling the voltage applied to the second set of electrodes (42) the output beam (17) can be continuously deflected through a controlled angle to facet track a rapidly rotating multi-faceted mirror of a raster output scanner. The substrate is fabricated using a new technique whereby the atmosphere in which the waveguiding surface is diffused is controlled. In particular, the diffusion is done in a heated oxygen environment having an elevated moisture content. Thereby the incidence of optical damage in the wave guide caused by the laser beam is reduced.</p> |
