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发明名称
摘要
申请公布号
JPS5761833(U)
申请公布日期
1982.04.13
申请号
JP19800137139U
申请日期
1980.09.29
申请人
发明人
分类号
H01L21/316;H01L29/06;(IPC1-7):H01L21/316
主分类号
H01L21/316
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代理人
主权项
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