| 摘要 |
PURPOSE:To detect specified gas in an atmosphere and also, to perform a quantitative measurement of its concentration,by detecting the pressure in a hermetically sealed receptacle provided with a gas transmission wall body. CONSTITUTION:A semiconductor pressure conversion element 2 and a constant volume hermetically sealed space 7 composed of net plates for reinforcements 8, 8 forming a porous substate and a desired specific gas transmission wall body made by a high moleular membrane 6 which is formed by plasma polymerization on a porous face putting between the plates 8, 8, are provided to a metallic receptacle of a membrane sensor 10. When this sensor 10 is placed in an atmosphere, an atmosphere, an atmospheric pressure air in the space 7 is replaced by the specific gas in the atmosphere having a larger transmission velocity than the air passing through the membrane 6 and pressure in the room 7 is varied. This pressure variation is detected through th element 2 and the detection of the specific gas in the atmosphere and quantitative measurement of its concentration are carried out surely. |
