| 摘要 |
PURPOSE:To detect surface roughness and surface flaws accurately and efficiently by determining the irregular reflected light component from a specimen surface. CONSTITUTION:The laser beam incident to a deflector 3 is reflected by the reflection surface 4 of a deflector 3 to the direction perpendicular to a specimen surface 1 and is made incident to the specimen surface 1. The laser beam reflected perpendicularly from the surface 1 advances reversely in the deflector 3 and only the irregularly reflected light is collected by a lens barrel 2, and is detected with a detector 7, after which it is processed with a processing device 8. Surface roughness and surface flaws are detected accurately and efficiently by such system of photodetecting only the erregularly reflected components corresponding to the surface roughness and surface flaws and processing the same. |
