发明名称 |
DETECTION OF POSITION AND VARIANCE OF LIGHT INPUT AND INSTRUMENT FOR THE SAME |
摘要 |
<p>PURPOSE:To obtain the position and the variance of light input with ease at a low cost and with a quick response by detecting primary output proportional to the mean value of distances between the ends of a photoelectric transducer and the position of light input and secondary output proportional to square mean value of said distances. CONSTITUTION:Primary output is detected by current values i1 and i2 obtained from both the ends 4 and 5 of a first resistance layer 1. On the other hand, secondary output is detected by current values j1 and j2 obtained from both the ends 6 and 7 of a second resistance layer 2. From the values of detected current, K10.integral x.rho(x)dx/integral rho(x)dx is obtained as the primary output proportional to the mean value (position of center of gravity) inversion (x) of distances between the ends 4-7 of a photoelectric transducer and a light input position A. Further, K20.integral x<2>.rho(x)dx/integral rho(x)dx is obtained as the secondary output proportional to the square mean value inversion x<2> of said distances. Based on those outputs, a light input position inversion (x) is detected as integral x.rho(x)dx/integral rho(x)dx and the variance sigma<2> of light input is detected by formula I.</p> |
申请公布号 |
JPS63212832(A) |
申请公布日期 |
1988.09.05 |
申请号 |
JP19870230946 |
申请日期 |
1987.09.17 |
申请人 |
KOBE STEEL LTD |
发明人 |
NISHIMOTO YOSHIRO;YONEDA YASUSHI;IMAOKA SHINICHI;NAKAI YASUHIDE;NAKAGAMI AKIMITSU;ONISHI YOSHIHIKO;TACHIBANA HIROYUKI;INOUE TAKAYOSHI;KUSAKA TAKUYA;TAKAMATSU HIROYUKI;TOJO SHIGEKI;KAJIKAWA HIROSHI;NISHIMURA KOZO |
分类号 |
G01B11/00;G01J1/02;G01M11/00;G01N21/88;H01L27/14;H01L31/02;H01L31/0216;H01L31/16 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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