| 发明名称 |
Vacuum evaporation system for deposition of thin films. |
| 摘要 |
<p>A blower and a dust collector are communicated through valves with an evacuated process chamber in which are disposed one or more sets of a film-substrate holder and an evaporation source in such a way that the blower, the dust collector and the process chamber constitute a closed circuit.</p> |
| 申请公布号 |
EP0048884(A2) |
申请公布日期 |
1982.04.07 |
| 申请号 |
EP19810107266 |
申请日期 |
1981.09.15 |
| 申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
SHINOHARA, KOICHI |
| 分类号 |
C23C14/00;C23C14/24;C23C14/56;G11B5/85;H01F41/20;(IPC1-7):23C13/08 |
主分类号 |
C23C14/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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