| 摘要 |
PURPOSE:To improve the coercive force and angular shape ratio, and to obtain an excellent magnetic recording medium, by making gaseous Xe or Kr, and Ar exist in a specific gaseous pressure ratio, and setting the precipitation speed/mixing gaseous pressure within a specific range, when Co (alloy) is vacuum vapor-deposited on the base body. CONSTITUTION:A base body 5 of a polyester film, etc. is set onto the lower surface of a water-cooled substrate 2 in a bell jar 1. Co (alloy) 6 in a hearth 3 is heated by use of an electronic beam heating device consisting of the hearth 3 and a thermion source 4, and is vacuum vapor-deposited so as to reduce the vapor-deposition angle alpha to 70 deg.. In this case, it is constituted so as to keep the pressure ratio of gaseous Xe, or Kr to Ar, that is Xe, Kr/Ar is within the range of 0.5-10, and the precipitation speed/mixing gas pressure, of Co (alloy) to the base body 5 is within 5-1,000mu/min/torr, in the jar 1. In this way, an excellent magnetic characteristic is obtained without decreasing the precipitation speed of Co (alloy). |
