| 摘要 |
PURPOSE:To provide a sliding member in which a substrate and a silicon carbide layer are firmly bound and which has superior sliding characteristics by providing a metallic coating beforehand on the surface part of the aluminum substrate then forming the silicon carbide coating layer by sputter vapor deposition. CONSTITUTION:Metallizing of Mo or Mn-Mo alloy is applied on the surface part of an alumina substrate 2 of a sliding member 1, whereby a metallic coating layer 3 is provided. Thence, silicon carbide is vapor deposited by sputtering, whereby a silicon carbide coating layer 4 of prescribed length is formed. According to this method, the alumina substrate 2 and the silicon carbide coating layer 4 are firmly bound by the metallic coating layer 3. Since the member 1 is so designed that it is released and eliminated of differences in thermal expansion, thermal strains, etc. by the layer 3, it is adaptable for sealing rings of mechanical seals, sliding surfaces of bearings, and sliding members of turbines and pumps. |
