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发明名称
VACUUM VAPOUR-DEPOSITION APPARATUS
摘要
申请公布号
GB2000882(B)
申请公布日期
1982.04.07
申请号
GB19780027597
申请日期
1978.06.22
申请人
HITACHI LTD
发明人
分类号
C23C14/54;G05D5/03;(IPC1-7):C23C13/00;G05B15/02
主分类号
C23C14/54
代理机构
代理人
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