| 摘要 |
PURPOSE:To manufacture a magnetic recording medium which is excellent in a magnetic characteristic without decreasing a precipitation speed of a ferromagnetic material, by vacuum vapor-depositing Co (alloy) on the base body in a mixing gaseous atmosphere consisting of gaseous Ar and gaseous O2 of a specific condition. CONSTITUTION:In a bell jar 1, a water-cooled substrate 2 which has set a base body 5 on its lower surface, a hearth 3 which has set Co (alloy) 6 and a thermion source 4 are placed. Subsequently, vacuum exhaust is executed by a rotary pump 7 and a diffusion pump 8, also gaseous Ar and gaseous O2 are led in and mixed from a gas lead-in pipe 9 connected to the side wall of the bell jar, a gaseous pressure ratio of Ar gas and gaseous O2 in the system, and a precipitation speed/gaseous O2 pressure ratio are adjusted to (Ar/O2)1-1,000 and 20-6,700mu/min/torr, respectively, then, the Co (alloy) is vacuum vapor-deposited on the basic body 5. In this way, a ferromagnetic metallic thin film layer which is satisfactory in coercive force and an angular shape is formed, and a magnetic recording medium which is excellent in a magnetic characteristic is obtained. |
