发明名称 Hochvakuumpumpe
摘要 1,182,725. Ion pumps. VARIAN ASSOCIATES. 3 April, 1968 [5 April, 1967], No. 16069/68. Heading H1D. A getter-ion pump comprises a cellular anode 6 and two spaced cold cathodes 11, at least one of the cathodes having apertures 21 in registry with the anode apertures, wherein getter material is sublimed from a sublimator 22 so that in operation ions formed into plural ion beams emanating through the apertures in the cathode and incident upon a target electrode 36, e.g. the metal envelope are buried in and covered over by the sublimed getter material. The cathodes form polepieces for the C- shaped magnet 12, part of the envelope adjacent the magnet being of magnetic material. Alternatively an exterior electro-magnet may be provided. The sublinator consists of two thermionic emitters 28 and a rod 23 of getter material, e.g. titanium, held at a high positive potential. Both cathode structures may be apertured and an arrangement is described (Fig. 3, not shown) in which four pumping structures are disposed within one envelope.
申请公布号 DE1764062(A1) 申请公布日期 1971.04.29
申请号 DE19681764062 申请日期 1968.03.28
申请人 VARIAN ASSOCIATES 发明人 C. HELMER,JOHN
分类号 H01J41/20 主分类号 H01J41/20
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