| 摘要 |
PURPOSE:To avoid the stress concentration and to prevent the induction of defect in a semiconductor device by forming the pattern of an oxidized part in circular-arc or polygonal shape at the corners. CONSTITUTION:To disperse the stresses at the corners of a rectangle, two sides are slowly connected with shorter arc than the circular arc of a quadrant. Or, stresses at one corner is dispersed into a plurality of points with a plurality of obtuse angles. Thus, when a region 6 is oxidized, the stress to the region 7 can be alleviated, the stress concentration at the point 10 can be avoided. |
