| 摘要 |
PURPOSE:To increase the magnetic characteristics without lowering the depositing speed, by using the specific gas atmosphere when Co or the Co alloy is vapor- deposited in the vacuum state onto a substrate. CONSTITUTION:When a ferromagnetic material 6 of Co, etc. is vapor-deposited in the vacuum state onto a substrate 5 within a bell jar 1, gaseous nitrogen is put into the jar 1 within a range of 5-200mu/minute/Torr in terms of the depositing speed/ gas pressure. |
