| 摘要 |
PURPOSE:To produce an acoustic vibrating material of B4C by forming a B4C film adhered to a substrate by accelerating synthetic B4C in a high electric field. CONSTITUTION:A boron single element 3 is vaporized and hydrocarbon gas, such as acetylene and methane, is made into plasma. In the plasma, the boron element and a carbon element are made to react on each other chemically (vapor-phase reaction) to produce B4C, which is accelerated in a high electric field to be deposited on the surface of a titanium base material 4, thus forming a B4C film. In this case, reaction conditions, such as the vaporing speed of boron and hydrocarbon gas pressure (gas concn.) are selected properly to obtain the B4C film close to stoichiometric composition (78.3wt% B and 21.7wt% C). |
