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发明名称
Alloyed metal contact prodn. on oriented semiconductor crystal - by rastering surface with intense pulsed laser light before applying metal assists alloying
摘要
申请公布号
DE3032461(A1)
申请公布日期
1982.04.01
申请号
DE19803032461
申请日期
1980.08.28
申请人
SIEMENS AG
发明人
PATALONG,HUBERT,DR.-ING.;F.,DIPL.-PHYS.DR. KRIMMEL,EBERHARD
分类号
H01L21/28;H01L21/24;H01L21/263;H01L21/268;H01L21/285;H01L29/45;(IPC1-7):01L21/24;01L29/74;01L21/268
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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