| 摘要 |
PURPOSE:To obtain a load cell smaller and lighter by laminating a first insulation film, a manganin film and a second insulation film sequentially to form a sensor for detecting a load. CONSTITUTION:A first insulation film 6 is made on the surface of a metal substrate 5 and a second insulation film is made after a manganin film 7 is deposited thereon to form a sensor 2, which is housed in a container 3 of a load cell 1. An air hole 3a is made on the container 3, which is filled with oil. The sensor is arranged to be in contact with a load receiving base 4 which receives and transmists a load to the sensor. When a load W is applied on the load receiving base 4, the base 4 gets in contact with the manganin film 7 through a spherical section at the tip and a pressure distribution is developed to change the resistance of the film 7. Thus, the detection of the change is the resistance allows the load to be determined. |
