发明名称 PELLET-TRANSFER DEVICE
摘要 PURPOSE:To make a compact pellet-transfer device to transfer a pellet from a first position to a second position which are not situated on an identical plane and to enhance the operation efficiency by a method wherein individual pellet-holding axis lines corresponding to the first position and the second position of a pellet holder are arranged in a tilted manner with reference to a swivel central axis line of a swivel arm. CONSTITUTION:The following three are installed: a swivel arm 13 which is supported by a stand 17 and swivels around a swivel central axis line 13A; a pellet holder 14 which is supported by the swivel arm 13 and supports a pellet 11A; a swivel drive 15 which swivels the swivel arm 13 and shifts the pellet 11A supported by the pellet holder 14 from a first position 11 to a second position 12. At this pellet-transfer device 10, individual pellet-holding axis lines 14A, 14B in two positions corresponding to the first position 11 and the second position 12 of the pellet holder 14 are arranged in a tilted manner with reference to the swivel central axis line 13A of the swivel arm 13. By this setup, the mechanism is simplified and miniaturized; the operating efficiency is enhanced; the pellet can be shifted from the first position to the second position which are not situated on an identical plane.
申请公布号 JPS63216349(A) 申请公布日期 1988.09.08
申请号 JP19870048719 申请日期 1987.03.05
申请人 TOSHIBA SEIKI KK 发明人 ARIE MAKOTO;IWAKI YASUO
分类号 H01L21/52;B23P19/00;B65G47/91;H01L21/677;H01L21/68 主分类号 H01L21/52
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