| 摘要 |
PURPOSE:To increase the efficiency of work and improve the reliability of an address by a method wherein a pattern to be a mark for detecting a position is formed on a photomask for active matrix IC formed of a repeated pattern. CONSTITUTION:On the mask other than that on the repeated pattern formed in the directions X and Y, a numeral is put, as the mark, on the right and left sides and on the upper and lower sides of the repeated pattern so as to make a pair with the latter. By this constitution, the efficiency of the work including the modification of the pattern and the analysis of a completed article is improved. |
