| 摘要 |
PURPOSE:To prevent generation of inferiority because of chipping off of edge of pellet, etc., and to enhance yield and workability of the pellet by a method wherein an elastic layer formed in a plane is coated on the pellet drawing part of a collet, and a positioning means is provided on the collet. CONSTITUTION:The tip end of the collet 11 being provided at the center with a penetrating hole 7 to be connected to a vacuum pump is made as flat, and a resin layer of Teflon, etc., for example, having elasticity is applied thereon and is formed to provide the drawing part 9. The positioning means being movalbe upward and downward against the collet 11 and being consisted of an outside frame 10 having taper at the inside of the lower end can be provided in this collet 11. For example, when die bonding of pellet on a mounting pedestal having protective walls 12 is to be performed, the pellet is made to be adhered by guiding the outside circumference of the protective walls 12 with the taper faces of the outside frame 10 of the collet 11 drawing the pellet 4. Accordingly chipping off of edge or inferiority of mounting can be prevented, and precise bonding can be peformed having high efficiency. |
