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发明名称
HANDOTAITANKETSUSHONOBUNKATSUHOHO
摘要
申请公布号
JPS5754326(A)
申请公布日期
1982.03.31
申请号
JP19810122362
申请日期
1981.08.04
申请人
SIEMENS AG
发明人
BERUNTO KORUBEZEN
分类号
H01L21/304;H01L21/301;H01L21/306
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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