| 摘要 |
PURPOSE:To stabilize quality of the evaporation film for wiring etc. and enable microdesign by protruding the spacer around the opening part of the mask sheet and making the spacer contact with the substrate. CONSTITUTION:The spacers 7, 8 composed of the material of which hardness is same or below that of the film material are protruded around the opening part 6 of the mask sheet 5. This mask sheet 5 and the mask sheet holder 11 are overlaid on the substrate 9 and the spacers 7, 8 are contacted with the substrate, and positioned, so as the mask sheet 5 does not contact directly with the substrate 9. Evaporation or sputtering are done to the substrate 9 from the evaporating source 15 through each opening 12, 6 of the mask sheet holder 11 and the mask sheet 5. In this case, flash of sputtering etc. is cut by the spacers 7, 8. And warping to the substrate which occurs during the middle and high temperature operation is dissolved by escape of the mask sheet 5. |
