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发明名称
METHOD AND DEVICE FOR CONTROLLING DEEP LEVELS IN SEMICONDUCTORS
摘要
申请公布号
SU843642(A1)
申请公布日期
1982.03.30
申请号
SU19802888062
申请日期
1980.02.14
申请人
INSTFIZ POLUPROVODNIKOV SIBIRSKOGO OTDEL AN SSSR
发明人
PRINTS V.YA.,SU;ORLOV O.M.,SU
分类号
H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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