发明名称 Ultrahochvakuumvorrichtung
摘要 1,194,582. Vacuum systems. PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd. June 26, 1967 [June 27, 1966], No.29363/67. Heading F1N. A vacuum chamber is divided into two regions 1a, 1b having a valve member 2a therebetween, whereby, with the valve member in an open position 2a 3 , both regions are initially evacuated through a duct 8, 10, and with the valve in a closed postion 2a 1 , the region 1a is further evacuated by an ionization pump 3 connected thereto. The initial evacuation through the ducts 10, 8 is achieved by a diffusion pump 57 connected to a primary pump 52 via a vacuum chamber 54, a valve 64 and a trap 53. A piston 12 slidable in a cylinder in response to pressure or vacuum connected to cylinder chambers 13, 14 is connected by a rod 7 to cause operation of the valve 2a. The rod 7 passes into the chamber region 1b through a sealed chamber 17 permanently connected to the vacuum chamber 54 through a conduit 21. If the valve is moved to a position 2a 2 both regions may be subjected to a preliminary vacuum by the primary pump 52 acting through a line 20 having a valve 65 which is closed before the diffusion pump 57 is operated. When the valve is moved to the position 2a<SP>3</SP>, tubing 19 is filled with liquid hydrogen by a pump 59.
申请公布号 DE1628443(A1) 申请公布日期 1971.08.19
申请号 DE19671628443 申请日期 1967.06.26
申请人 N.V. PHILIPS' GLOEILAMPENFABRIEKEN 发明人 BAILLEUL-LANGLAIS,JOSETTE;NEUVILLE,JEAN
分类号 B01J3/00;C23C14/56;F04F9/04 主分类号 B01J3/00
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