发明名称 Capacitive pressure sensor
摘要 The disclosure relates to a capacitive pressure transducers which includes a flexible diaphragm. The flexibility of the diaphragm varies with temperature and thus different capacitance values result from the same pressures at different temperatures. To compensate for the variance of flexibility and capacitance values parts of the transducer are chosen with respect to specific temperature of coefficients.
申请公布号 US4322775(A) 申请公布日期 1982.03.30
申请号 US19790089162 申请日期 1979.10.29
申请人 DELATORRE, LEROY C. 发明人 DELATORRE, LEROY C.
分类号 G01L9/00;(IPC1-7):H01G7/00;H01G5/34 主分类号 G01L9/00
代理机构 代理人
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