| 摘要 |
PURPOSE:To make it possible to control relative positions beteen a beam light source and an object surface and the attitude of the same, by utilizing the beam light source, a ring shaped transparent part, and a pair of a ring shaped photocells and a sensor which are concentrically arranged, and the like. CONSTITUTION:The light beam is projected on the object to be measured. The reflected light is received by a pair of the ring shaped photocells and the ring shaped sensor provided in-between, which are concentrically provided, via the ring shaped transparent part. Then the signal is processed, the distance to the object surface and the inclination thereof are sensed, and the control device is driven to keep a constant state. For example, the light beam P is projected to the object to be measured M from optical fiber 2 which is protruded from an opening end 1a of an outer tube 1. The reflected light passes the ring shaped transparent part 4, and is received by a pair of the photocells 7 and 9 and the position sensor 8, which are concentrically arranged. A servo-mechanism is driven by said output, and the relative positions of the measuring device and the object to be measured and the attitude thereof can be kept constant. |
