| 摘要 |
PURPOSE:To measure the temperature of an ion with high accuracy and workability immediately before it is injected into a target by which providing a mechanical beam shutter with a temporary target between a magnetic field and the target so as to freely revolve and connecting a temperature measurement circuit to the temporary target. CONSTITUTION:An ion beam 13 which is selected by a magnetic field 12 from the ion source 10 of an ion injector 17 through an accelerator 11 arrives at a mechanical shutter 16 which is enclosed by a slit 15. The beam 13 irradiates a temporary target 16b which is provided on the curved plate 16a of the shutter 16 and the ion temperature is measured by a temperature measurement circuit 18 which is connected to the target 16. After the temperature is measured, the shutter 16 is revolved by 90 degrees and the beam 13 is directly irradiated on a target 14. As a result, the temperature of an ion immediately before it is injected into the targer 14 can be measured with high accuracy and workability. |
