| 摘要 |
PURPOSE:To improve the yield of a test by increasing the items of control signals between an external tester and a wafer probe body and sensitively analyzing a semiconductor chip and obtaining wafer map information with the external tester controlling the wafer probe body. CONSTITUTION:When a test is started, an external tester 1 controls a wafer probe body 2. A control, e.g., an improper chip 10 returned into the semiconductor wafer 9 and reconfirmed with the result of the test is remeasured before marking it with a marker 11 and is marked if it is improper, is automatically carried out for a wafer probe body 2 according to the content of the test program of the external tester 1. The control signal of the probe body is concentrated and is thus fed externally. In this manner, the chip can be analyzed and the map information can be sensitively obtained to improve the yield of the test. |
