发明名称 Elektrischer Anschluss fuer einen metallischen Film
摘要 1,220,184. Resistors. WESTERN ELECTRIC CO. Inc. 29 Feb., 1968 [9 March, 1967], No. 9856/68. Heading H1S. A contact termination for a sputtered tantalum nitride resistor on a ceramic or glass substrate comprises a first layer of Cr or a Ni-Cr alloy maximum 80% Ni deposited on the tantalum nitride, a second layer selected from Pt, Pd, Ru and Rh and a third layer of Au. The layers are vapour deposited through a mask to give the required resistance which is controlled by deposition on a monitoring substrate. First layer thickness 100-800 Š, second layer 2500-3500 Š and third layer 3200-4500 Š.
申请公布号 DE1690521(A1) 申请公布日期 1971.09.16
申请号 DE19671690521 申请日期 1967.12.07
申请人 WESTERN ELECTRIC CO. INC. 发明人 MARCUS JOHNSON JUN.,PAUL
分类号 C23C14/18;H01C1/142;H01C1/144;H01C17/28 主分类号 C23C14/18
代理机构 代理人
主权项
地址