| 摘要 |
PURPOSE:To simplify the structure and to improve the cooling effect, by arranging two carbon pipes supported by pipes for passing the coolant in parallel while rotating the entire body around the center between the pipes thereby regulating the amount of the incident beam. CONSTITUTION:A metallic rod for supporting two carbon pipes 2 arranged in parallel is the double structure of an outer tube 3 and an inner tube 4 and can be cooled by the water through a cooling water pipe inlet 5 and outlet 6. The entire body is rotated by a rotary shaft 7 around the central point O between the pipes 2 to vary the slit width and to regulate the amount of the incident ion beam 1. Since the portion impinged with the beam is a carbon cylinder, the work and the fixing are facilitated and the spatter damage is reduced, while since the entire carbon pipe is cooled the cooling effect can be improved and since simple structure is employed where the opening/closing of the slit is performed by single motor rotary mechanism the reliability of the operation can also be improved. |
