发明名称 CHARGED PARTICLE IRRADIATOR
摘要 PURPOSE:To make uniform the irradiation over the entire region of the subject, by detecting the charged particle irradiation against the target irradiation corresponding with each irradiating position of the subject then comparing it with the target irradiation, and sequentially varying the irradiating position when it is reached to the target irradiation. CONSTITUTION:A charged beam 5 is irradiated from a charged particle source 6 onto a subject 1. Then said charge is accumulated by an accumulator 2 and compared with the target level of a target charge setting means 4, and upon reaching to the target level the irradiating position is changed. Thereafter same operation is repeated to display the irradiation per unit area thus to perform the distribution control of the irradiated particle directly.
申请公布号 JPS5750759(A) 申请公布日期 1982.03.25
申请号 JP19800124583 申请日期 1980.09.10
申请人 HITACHI SEISAKUSHO KK 发明人 NAKASHIMA FUMIHIKO;SHIBATA ATSUSHI
分类号 H01J37/317;H01J37/304;H01L21/265 主分类号 H01J37/317
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