DEVICE FOR SCANNING CHARGED PARTICLE BEAM,申请号DE19792953877-传众专利搜索

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发明名称	DEVICE FOR SCANNING CHARGED PARTICLE BEAM
摘要
申请公布号	DE2953877(A1)	申请公布日期	1982.03.25
申请号	DE19792953877	申请日期	1979.10.18
申请人	VALTMAN D;RAZIN G	发明人	VALTMAN D;RAZIN G
分类号	G21K1/08;G21K1/093;G21K5/00;G21K5/04;G21K5/10;H01J33/00;H01J37/147;(IPC1-7):H05H7/10	主分类号	G21K1/08
代理机构		代理人
主权项
地址

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