发明名称 CHARACTERISTIC DISCRIMINATION INDICATION OF SEMICONDUCTOR CHIP
摘要 PURPOSE:To prevent misindication and to increase workability, by a method wherein a defect signal from a probe is received after judging quality by closely attaching the probe of a quality judging device to each of the semiconductor chips and quality indication is printed on defective chips. CONSTITUTION:The probe of a quality judging device is closely attached to each of a plurality of chips 10a formed on a semiconductor wafer 10 for an electrical characteristic test and the quality is jedged. Next, a dot printer 11 electrically connected to the probe of the quality judging device is used to print indication modes 12 for defective chips on defective chips 10a' in accordance with a detection signal for defective chips. This method prevents misindication to good chips and increase the workability.
申请公布号 JPS5750443(A) 申请公布日期 1982.03.24
申请号 JP19800126325 申请日期 1980.09.11
申请人 TOKYO SHIBAURA DENKI KK 发明人 HOASHI YUKIKAZU
分类号 H01L21/66;(IPC1-7):01L21/66 主分类号 H01L21/66
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