PLASMA ETCHING APPARATUS,申请号EP19810106743-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	PLASMA ETCHING APPARATUS
摘要
申请公布号	EP0047002(A3)	申请公布日期	1982.03.24
申请号	EP19810106743	申请日期	1981.08.28
申请人	TOKYO SHIBAURA DENKI KABUSHIKI KAISHA	发明人	YAMAZAKI, TAKASHI
分类号	C23F4/00;H01J37/32;H01L21/302;H01L21/3065;(IPC1-7):H01L21/30	主分类号	C23F4/00
代理机构		代理人
主权项
地址

您可能感兴趣的专利

Improvements in the automatic lighting of an electric stop signal on cycles

Improvements in or relating to gas meters

Improvements in pivotal mountings for mirrors

Improved apparatus for bringing fluids into intimate contact with one another

Internal combustion engine

Flush cover access opening

TEMPERATURE CONTROL SYSTEM

ELECTRIC AUTOMATIC SWITCH

Improvements in filter drum construction

Improvements in sulphonated terpenyl alkyl phenols

Schaltung zur Verstärkung von modulierten Hochfrequenzschwingungen für die Endstufe eines Senders.

Combined leaf holder and bookmark

Pressed steel pulley and method of producing same

Method of and machine for sealing capped containers

Lubricating system for sewing machines