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发明名称
摘要
申请公布号
JPS5750852(U)
申请公布日期
1982.03.24
申请号
JP19800128261U
申请日期
1980.09.08
申请人
发明人
分类号
H01L21/673;H01L21/22;H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/673
代理机构
代理人
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