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发明名称
摘要
申请公布号	JPS5751260(U)	申请公布日期	1982.03.24
申请号	JP19800124780U	申请日期	1980.09.02
申请人		发明人
分类号	F23Q3/00;H01L41/08;H01L41/113;(IPC1-7):F23Q3/00	主分类号	F23Q3/00
代理机构		代理人
主权项
地址

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