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发明名称
Verfahren zur Herstellung eines Halbleiterbauelements
摘要
申请公布号
DE2020531(A1)
申请公布日期
1971.11.18
申请号
DE19702020531
申请日期
1970.04.27
申请人
SIEMENS AG
发明人
DR. HENNING,WOLFGANG,DIPL.-PHYS.;VON,DIPL.-PHYS. HOERSCHELMANN,KONSTANTIN;KRUEGER,INGO,DIPL.-PHYS.;WEIDLICH,HERBERT,DIPL.-PHYS.DR.
分类号
H01L21/00;H01L23/29;H01L23/485;H01L29/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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