| 摘要 |
PURPOSE:To stabilize the bonding property and to accelerate the bonding velocity of an automatic supersonic bonder in a device for controlling and collecting the displacement of the position of a pellet by disposing a rotatable pellet holder in x-axis or y-axis stage and forming a vibrator to have degree of freedom only in z-axis direction. CONSTITUTION:A specimen, e.g, IC62 is set on a holding base 54 driven by a motor 49 secured to a y-axis stage 52, and can be rotated at theta. The state 52 is disposed on an x-axis stage 51, is driven in y-axis direction by drying systems 45- 47, and is moved in x-axis direction by the drive of the stage 51 via bearings 48 holding an L-shaped unit. When x-axis, y-axis and theta position corrections are carried out by the detection signal of a camera 42, a vibrator 46 is lowered by a motor 43 provided at a head 44, and a pellet electrode is connected to a wire 59. Then the vibrator 56 is raised, the stage 52 is moved to the leading position, is again lowered to perform the bonding. Thus, the mass of high speed operating direction (y-axis) is reduced, thereby stabilizing the bonding work and enabling the high speed operation. |
