| 摘要 |
PURPOSE:To improve durability and reliability by using laser beam welding as a means for joining a liquid isolating diaphragm and a body. CONSTITUTION:The circumferences of a diaphragm retaining plate 14, a liquid isolating diaphragm 13, and a body 12 are joined simultaneously by laser beam welding. Then the changes in the characteristics of the diaphragm 13 to be cused by the strain owing to the joining of the diaphragm 13 and the body 12 and the change in the characteristics of a pressure sensing element and the diaphragm 13 owing to abrupt change in external pressure during evacuation are averted by these. |
