| 摘要 |
PURPOSE:To forcibly remove the oxide film in a magnetron vacuum container in which both an anode and an electrode are assembled and housed and stabilize its characteristics by applying heat-treatment on it in a hydrogen atmosphere at the specific temperature before its exhaust process. CONSTITUTION:A magnetron vacuum container (a) is formed by assembling an input section 7 enclosing an electrode 13 with a filament 18 having carbon-treated surface in a cylindrical anode body 1 provided with its anode blade piece 2 and sealing an output section 6 provided with an exhaust cylinder 10 mounted on it. The vacuum container (a) is heat-treated in a hydrogen atmosphere at approximately 800 to 900C, exhausted, and sealed before its exhaust process. Thus the oxide film in the container (a) caused by the welding heat during sealing can be effectively removed by reduction or thermal decomposition. As a result, its exhaust time can be reduced, while its degree of vacuum be improved, and a magnetron with excellent operational characteristics can be obtained. |
