| 摘要 |
PURPOSE:To obtain the interline CCD sensor, having no after image, and the driving method thereof by a method wherein the microscopic region, having the conductive type reverse to a substrate, is turned to pinch-off condition. CONSTITUTION:The unit cell of the interline CCD sensor is consisted of a P type substrate 100, an N type region 301, a P<+> type region 105, CCD transfer electrodes 103 and 104 and a field oxide film 101. When the electron generated by an incident ray is accumulated in the N region, the electric potential PSIN is turned to low level 302, and when the CCD transfer pulse phiCCD becomes high level, the electron of the N region is transferred to the CCD passing through the P<+> region. A pinch-off state is obtained by reducing the density of the N region, by having all electron transfered to the CCD and by turning the N region into depletion. As no electron exists in the N region, electric charge is not shifted to the CCD and no after image is generated. |
