| 摘要 |
PURPOSE:To stabilize discharge by fully performing preparatory ionization for heightening an output, by providing a capacitor including a dielectric and an auxiliary electrode on one side of a main electrode for constituting so as to make charge stored this capacitor to join in main discharge. CONSTITUTION:Charge from a high-voltage power supply 1 is firstly stored by the first capacitor 2. Next, when a switch 4 is closed, charge stored by the first capacitor 2 is stored by a capacitor 11 to be composed of the second main electrode 7, a dielectric 8 and an auxiliary electrode 9. On the way of this shift, creeping discharge for preparatory ionization is generated in an opening part of the second main electrode 7. Soon after, when voltage on both ends of the capacitor 11, that is voltage between the main electrode 6 and 7 reaches breakdown voltage, accumulated voltage of the capacitor 11 is made to main discharge 10. In this constitution, a preparatory ionization current and a main discharge current are not divided so as to increase capacity of the capacitor 11 and to stabilize discharge by sufficient preparatory ionization together with increasing a main discharge current in order to heighten a laser output. |
