发明名称 METHOD FOR FABRICATING A BIPOLAR TRANSISTOR HAVING A POLYSILICON BASE CONTACT AND A POLYSILICON OR METAL EMITTER CONTACT
摘要 <p>A method consisting of a sequence of process steps for fabricating a bipolar transistor having base contacts formed of polysilicon material and an emitter contact formed of polysilicon material or metal. The emitter contact is self-aligned to the base contacts by the use of process steps wherein a single mask aperture is used for defining the base contacts and the emitter.</p>
申请公布号 EP0005721(B1) 申请公布日期 1982.03.17
申请号 EP19790101221 申请日期 1979.04.23
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 NING, TAK HUNG;YU, HWA NIEN
分类号 H01L29/73;H01L21/033;H01L21/225;H01L21/285;H01L21/331;(IPC1-7):01L21/60;01L23/48;01L21/285;01L29/62;01L29/54 主分类号 H01L29/73
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