| 摘要 |
PURPOSE:To effectively feed a semiconductor substrate by supporting a member movably in the X-axis direction of an X-Z axis driving unit, pressing it in reverse direction by a spring, elevationally stupporting a pin to the member, and pressing it downwardly by a spring. CONSTITUTION:A support 21 is repeated in movements of Z1, Z2, Z3 and X4 axis directions by an X-Z driving unit 4, and a pin 24 is similarly moved. A substrate 1 is fed to the predetermined position A, the end of the pin 24 is introduced into a postioning hole 1a, is then fed in the X2-axis direction to the next step, is raised in the Z3-axis direction, and is then returned in X4-axis direction. Even if he pin is fed without ynchronization, the pin 24 is adapted to be pushed out in the feeding direction with a member 22 retarded at a distance B against a spring 23, the pin 24 is not bent, and the pin is introduced into the hole 1b by the next rectangular motion of the support to feed the substrate 1. Even if the substrate is excessively fed to pass the predetermined position A, the pin 24 has an allowance of the movement C of a spring 25, which does not damage the upper surface of the substrate, but the pin is dropped into the hole by the X2-axis movement, and the substrate 1 is thus fed. In this manner, the substrate can be effectively fed without damage. |
