发明名称 Zusammengesetzter heteroepitaxialer Aufbau
摘要 1,153,404. Light modulators. NORTH AMERICAN AVIATION Inc. 20 Sept., 1967 [20 Sept., 1966], No. 42885/67. Heading H4F. [Also in Divisions C7 and H1] A Pockels device comprises in order, a monocrystalline insulating substrate, a layer of metal, an epitaxial semiconductor layer and a layer of tin oxide. The substrate is preferably sapphire (alpha corondum), BeO, MgO or spinel whilst the metal may be W, Mo, V, Ta or Nb. If a sapphire substrate is used then it is cut parallel to either the 1102 or the 1126 plane. The metal may be deposited by thermal decomposition of a volatile halide, e.g. WF 6 , in an inert gas. ZnS, ZnSe, CdS or CdSe may be used for the semi-conductor layer and is deposited either as the compound or by chemical reaction in argon or hydrogen. The structure may be placed in an evacuated tube and scanned by an electron beam.
申请公布号 DE1665267(A1) 申请公布日期 1972.02.03
申请号 DE19671665267 申请日期 1967.09.15
申请人 NORTH AMERICAN AVIATION INC. 发明人 GALLI,GUIDO;LEONARD MORRITZ,FRED;ATWOOD WILEY,CARL
分类号 G02F1/00;G02F1/03;H01L21/00;H01L21/60 主分类号 G02F1/00
代理机构 代理人
主权项
地址