发明名称 Method of producing semiconductor displacement transducer
摘要 A strain gauge is formed on one main surface of a semiconductor single crystal substrate while an insulating oxide film is formed on the other main surface of the substrate. A metal junction layer including several layers inclusive of eutectic alloy layers is formed on the surface of the insulating oxide film and the thus prepared structure is mounted on a metal strain generator. By heating this assembly to temperatures approximating to the eutectic point of the eutectic alloy layer, the semiconductor substrate and the metal strain generator are joined together.
申请公布号 US4319397(A) 申请公布日期 1982.03.16
申请号 US19800165985 申请日期 1980.07.07
申请人 HITACHI, LTD. 发明人 TANABE, MASANORI;SHIMADA, SATOSHI;YASUKAWA, AKIO;NEMOTO, HIDEYUKI;NISHIHARA, MOTOHISA;TSUCHIYA, MASATOSHI;SOENO, KO
分类号 G01D5/16;H01L29/84;(IPC1-7):H01L21/58 主分类号 G01D5/16
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