摘要 |
PURPOSE:To find the abnormal position quickly by determining whether the cause of the output abnormality of a mass spectrometer is in an ionizing section or a specimen providing section from the degree of vacuum in the ionizing section. CONSTITUTION:A specimen is provided from a specimen providing section 1 and the thermion produced from a heater in an ionizing section 2 is impinged against a specimen to perform the ionization. Thus produced ion is analyzed by a magnet 3 and detected by an ion collector 4. The output from the collector 4 is amplified and operated by an amplifier 5 and an arithmetic section 6 to be displayed on a display 9. While the degree of vacuum in the ionizing section 2 is measured by a vacuum meter 7, then the measured vacuum level and the output from the amplifier 5 are compared with the setting level to display the result on a display section 9. It is normal if the vacuum level and the output from the amplifier show the predetermined levels, but when the amplifier 5 produces the abnormal level it is decided whether the abnormality is in the ionizing section 2 or in the specimen providing section 1 from the vacuum level. |