| 摘要 |
PURPOSE:To enable the adjustment of the detection of the position of the electron beam irradiating section or the focusing degree, by detecting the irradiation of the electron beam through electron beam detection X, Y electrodes of stripe-shape then monitoring it. CONSTITUTION:The electron beam 12 radiated from a filament 1 is irradiated through alignment coils 4, 5, electromagnetic lens coil 9 and deflection coils 10, 11 onto a subject 15. Stripe-shaped electron beam detecting X, Y electrodes 16, 17 are arranged at the exit of the deflection coils 10, 11 while separating by minute distance and crossing perpendicularly each other, then the position and the area of the electron beam are operated in an arithmetic circuit 18 to be indicated on a display 19. While a subject 15 is mounted on a X, Y table 24 movable in X, Y directions, and the position signal 26 of the table 24 is indicated on a display 19. Consequently the adjustment of the electron beam and the position of the subject can be facilitated. |
