| 摘要 |
PURPOSE:To improve resolution and proximity effect by attaching an opaque mask to the surface of a transparent substrate, and forming this substrate or mask of a light element metal or its compound or alloy of a small coefft. of reflection of electrons. CONSTITUTION:An opaque mask 12 which shuts off light is attached onto the top surface of a transparent substrate 11 which transmits light, and a resist 13 for electrosensitization is attached on the top surface of this mask 12. The substrate 11 is formed on the top surface of this mask 12. The substrate 11 is formed of LiB type glass, for example, 30% lithium and 70% boron oxide, and its coefft. of reflection of electrons is extremely small. The LiB type glass forming the substrate 11 is mixed with alumina, magnesia, etc. so that its coefft. of thermal expansion is set low. The mask 12 is formed of carbon and its coefft. of reflection of electrons is extremely small as compared to chromium or the like, and the resist 13 is drawn to prescribed patterns by electron beams. |
