| 摘要 |
PURPOSE:To detect a position of predetermined pattern with high accuracy by conforming an optical system of a camera device with a working axis of the working device and vertically disposing the optical shaft to a workpiece when the workpiece with the pattern is worked by detecting the position of the pattern by means of the camera device. CONSTITUTION:The workpiece 17 is arranged onto a sample base 18, the pattern on the surface is photographed by means of the TV camera 11, and the positon of the pattern is detected by means of a controller. An objective 13' of an imaging optical system 12 takes a shape obtained by notching a central section of a normal lens with a rotary symmetic form, and the optical axis 14 passes outside the lens, and agrees with the working axis of the bonding tool 15. The central axis of a bodytube of the imaging optical system 12 is disposed where shifting in parallel from the working axis by approximately several cm. After the position is detected complerely, all pats are wire-bonded by means of the bonding tool 15. Accordingly, the speed of treatment is increased, and the recognizing treatment of the pattern is simplified. |
