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发明名称
RESISTANCE FILM SPUTTERING DEVICE
摘要
申请公布号
JPS5745205(A)
申请公布日期
1982.03.15
申请号
JP19800120769
申请日期
1980.09.01
申请人
FUJITSU KK
发明人
TANMACHI HARUO;TERAJIMA MINORU
分类号
H01C17/12
主分类号
H01C17/12
代理机构
代理人
主权项
地址
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